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Micro-scale kinetic energy harvesters are in large demand to function as sustainable power sources for wireless sensor networks and the Internet of Things. However, one of the challenges associated with them is their inability to easily tune the frequency during the manufacturing process, requiring devices to be custom-made for each application. Previous attempts have either used active tuning, which consumes power, or passive devices that increase their energy footprint, thus decreasing power density. This study involved developing a novel passive method that does not alter the device footprint or power density. It involved creating a proof mass with an array of chambers or cavities that can be individually filled with liquid to alter the overall proof mass as well as center of gravity. The resonant frequency of a rectangular cantilever can then be altered by changing the location, density, and volume of the liquid-filled mass. The resolution can be enhanced by increasing the number of chambers, whereas the frequency tuning range can be increased by increasing the amount of liquid or density of the liquids used to fill the cavities. A piezoelectric cantilever with a 340 Hz initial resonant frequency was used as the testing device. Liquids with varying density (silicone oil, liquid sodium polytungstate, and Galinstan) were investigated. The resonant frequencies were measured experimentally by filling various cavities with these liquids to determine the tuning frequency range and resolution. The tuning ranges of the first resonant frequency mode for the device were 142–217 Hz, 108–217 Hz, and 78.4–217 Hz for silicone oil, liquid sodium polytungstate, and Galinstan, respectively, with a sub Hz resolution. 

Microelectromechanical Systems (MEMS) packaging is over 80% of the cost of a typical MEMS device because there are no standard packaging methods, and each device requires unique packaging. Recently several MEMS devices have illustrated the desire to have a liquid filled cavity within the MEMS device for applications such as biomedical sensors, tunable energy harvesters, or liquid cooling microelectronics. However, embedded liquids in silicon pose a challenge when it comes to packaging. This paper illustrates a novel concept of using a conformal parylene coating to cap or encapsulate the liquid. The concept is validated using various liquids such as various viscosity silicone oils as well as Galinstan a Ga-based liquid metal. The study investigates the packaging reliability through a series of systematic accelerated life-time testing, elevated temperature testing, accelerated soak testing, and mechanical testing (shock and resonant frequency testing). Mass changes were monitored and compared to control (no capping), glass epoxy bonded packaging, and silicone spray coating encapsulation. The results demonstrate the superior mean-time-to-failure of the parylene capping method compared to the other methods. The results confirm that parylene can be used to package embedded liquids in silicon or 3D printed structures. 

The inability to tune the frequency of MEMS vibration energy-harvesting devices is considered to be a major challenge which is limiting the use of these devices in real world applications. Previous attempts are either not compatible with microfabrication, have large footprints, or use complex tuning methods which consume power. This paper reports on a novel passive method of tuning the frequency by embedding solid microparticle masses into a stationary proof mass with an array of cavities. Altering the location, density, and volume of embedded solid filler will affect the resonant frequency, resulting in tuning capabilities. The experimental and computational validation of changing and tuning the frequency are demonstrated. The change in frequency is caused by varying the location of the particle filler in the proof mass to alter the center of gravity. The goal of this study was to experimentally and numerically validate the concept using macro-scale piezoelectric energy-harvesting devices, and to determine key parameters that affect the resolution and range of the frequency-tuning capabilities. The experimental results demonstrated that the range of the frequency tuning for the particular piezoelectric cantilever that was used was between 20.3 Hz and 49.1 Hz. Computational simulations gave similar results of 23.7 Hz to 49.4 Hz. However, the tuning range could be increased by altering the proof mass and cantilever design, which resulted in a tuning range from 144.6 Hz to 30.2 Hz. The resolution of tuning the frequency was <0.1 Hz